Institution of Engineering and Technology

The IET is a world leading professional organisation sharing and advancing knowledge to promote science, engineering and technology across the world.

Z-axis differential silicon-on-insulator resonant accelerometer with high sensitivity
Yanlong Shang
Micro & Nano Letters(2011),6(7):519
http://dx.doi.org/10.1049/mnl.2011.0129

This article is available from multiple sources. Please click on the logo of the service to which you have a subscription, or click any logo to obtain pay-per-view access.

IET Digital Library on Scitation
  Access the IET Digital Library



IEL on IEEE Xplore
  Access the IEL (IEEE/IET Electronic Library) on IEEE Xplore®