Skip to main content
SpringerLink
Log in

Fabrication Technologies of Field Emitter Arrays

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Total internal reflection (TIR) holographic lithography is studied as a new method for field emitter array (FEA) fabrication. Four basic parameters of the process - scan speed, laser power, focus distance and step distance, are analyzed to optimize the hole patterns. In addition, the characteristics of the Aluminum (Al) parting layer are studied to minimize the stress produced by Molybdenum (Mo) layer during Spindt-type tip formation process.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Karl A. Stetson, “Holography with Total Internally Reflected Light”, Applied Physics Letters, pp225, vol 11, Oct.(1967)

    Article  Google Scholar 

  2. J.M. Kim, B.I. Gorfinkel, J.H. Kang, E.V. Roussina, J. W. Kim, I.V. Chernyaeva, J.H. Choi, A.R. Zoulkarneev, “4” Field emission display development and its reliability analysis” IVMC’96, pp566 (1996)

    Google Scholar 

  3. Robert ISNARD “Pixel International the field emission display company”, IVMC’ 94, pp 413 (1994)

    Google Scholar 

  4. S. Ito, T. Watanabe, T. Yamamura, and K. Yano, Asia Dispalys’ 95 Tech. Dig. 617 (1995)

    Google Scholar 

  5. F. Clube, S. gray, D. Struchen, J-C Tisserand, S. Malfoy, I. Darbellay, “Holographic Microlithography”, Optical Engineering, pp2274, vol 34, No.9 Oct.(1995)

    Article  Google Scholar 

  6. S. Gray, F. Clube, “New developments in holographic mask lithography for large substrates”, Eurodisplay 93

  7. P. Ehbets, H.P. Herzig, R. Dandliker, “TIR holography revisited by coupled wave theory” 3rd International Conference on Holographic Systems, components and Applications Sep.(1991)

  8. C.A. Spindt, I. Brodie, L. Humphrey, and E.R. Westberg, J. Appl. Phys. 47, 5248 (1976)

    Article  CAS  Google Scholar 

  9. Shigeo Itoh et al, “Experimental Study of Field Emission Properties of the Spindt Type Emitter”, pp217, IVMC’ 94 conference (1994)

    Google Scholar 

  10. TENCOR FLX 2320 User Manual

  11. Balzers “Coating Materials and Targets” Catalogue (1995)

    Google Scholar 

Download references

Acknowledgement

The authors would like to thank S.Gray, F.Clube, B.Legratiet of Holtronic Technologies S.A. for fruitful discussion.

Author information

Authors and Affiliations

  1. Materials sector, Display Materials Lab, Samsung Advanced Institute of Technology, P.O. Box 11, Suwon, Korea, 440-600

    J. H. Choi, Y. S. Ryu, J. H. Kang, J. E. Jang, J. M. Kim, J. P. Hong, D. Y. Lim & V. Michine

Authors
  1. J. H. Choi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Y. S. Ryu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. J. H. Kang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. J. E. Jang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. J. M. Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. J. P. Hong
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. D. Y. Lim
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. V. Michine
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to J. H. Choi.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Choi, J.H., Ryu, Y.S., Kang, J.H. et al. Fabrication Technologies of Field Emitter Arrays. MRS Online Proceedings Library 471, 211–216 (1997). https://doi.org/10.1557/PROC-471-211

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-471-211

Search

Navigation