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High Resolution Tem Study of Diamond Formation on Silicon and Molybdenum Field Emitter Surfaces

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Abstract

Diamond is an attractive material for coating microfabricated metal and semiconductor field emitters, since it enhances the stability and emission characteristics of the emitter. In the present study, polycrystalline diamond thin films were grown on silicon and molybdenum field emitters by microwave plasma chemical vapor deposition, using the bias-enhanced nucleation technique. High resolution transmission electron microscopy (TEM) was used to analyze the morphology of the diamond film and the structure of the diamond/emitter interface. Electron diffraction patterns and high resolution images indicate the presence of a polycrystalline diamond film, as well as a polycrystalline SiC layer between the diamond film and the Si emitter. A carbide interlayer was also found to exist between the diamond and the Mo emitter surface. Parallel electron energy loss spectroscopy confirms the TEM identification of a polycrystalline diamond film.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC, 27695-7907, USA

    A. F. Myers, J. Liu, W. B. Choi, G. J. Wojak & J. J. Hren

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  1. A. F. Myers
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  2. J. Liu
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  3. W. B. Choi
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  4. G. J. Wojak
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  5. J. J. Hren
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Myers, A.F., Liu, J., Choi, W.B. et al. High Resolution Tem Study of Diamond Formation on Silicon and Molybdenum Field Emitter Surfaces. MRS Online Proceedings Library 354, 449–454 (1994). https://doi.org/10.1557/PROC-354-449

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  • DOI: https://doi.org/10.1557/PROC-354-449

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