We present experimental and numerical studies of the properties of a capacitively coupled $13.56\mathrm{MHz}$ discharge in a mixture of Ar and ${\mathrm{C}}_2{\mathrm{H}}_2$ with growing nanosize particles. It is found that at the initial stage of the growth, nanoparticles are accumulated near the sheath-plasma boundaries, where the ionization by electrons is maximal. The nanoparticles suppress the ionization due to the absorbing fast electrons and stimulate a quick change of the plasma parameters followed by a transition between different modes of discharge operation. At that moment the peaked distribution of the dust particles transforms into a flat one.

• Received 7 December 2007

DOI:https://doi.org/10.1103/PhysRevE.78.026410