Quantitative modeling of secondary electron emission from slow-ion bombardment on semiconductors

Marnik Bercx, Bart Partoens, and Dirk Lamoen
Phys. Rev. B 99, 085413 – Published 11 February 2019
PDFHTMLExport Citation

Abstract

When slow ions incident on a surface are neutralized, the excess potential energy is passed on to an electron inside the surface, leading to emission of secondary electrons. The microscopic description of this process, as well as the calculation of the secondary electron yield, is a challenging problem due to its complexity as well as its sensitivity to surface properties. One of the first quantitative descriptions was articulated in the 1950s by Hagstrum, who based his calculation on a parametrization of the density of states of the material. In this paper, we present a model for calculating the secondary electron yield, derived from Hagstrum's initial approach. We use first-principles density functional theory calculations to acquire the necessary input and introduce the concept of electron cascades to Hagstrum's model in order to improve the calculated spectra, as well as remove its reliance on fitting parameters. We apply our model to He+ and Ne+ ions incident on Ge(111) and Si(111) and obtain yield spectra that match closely to the experimental results of Hagstrum.

  • Figure
  • Figure
  • Figure
  • Figure
  • Received 25 April 2018
  • Revised 24 September 2018

DOI:https://doi.org/10.1103/PhysRevB.99.085413

©2019 American Physical Society

Physics Subject Headings (PhySH)

Condensed Matter, Materials & Applied Physics

Authors & Affiliations

Marnik Bercx*, Bart Partoens, and Dirk Lamoen

  • EMAT & CMT groups, Department of Physics, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium

  • *marnik.bercx@uantwerpen.be

Article Text (Subscription Required)

Click to Expand

Supplemental Material (Subscription Required)

Click to Expand

References (Subscription Required)

Click to Expand
Issue

Vol. 99, Iss. 8 — 15 February 2019

Reuse & Permissions
Access Options
Author publication services for translation and copyediting assistance advertisement

Authorization Required


×
×

Images

×

Sign up to receive regular email alerts from Physical Review B

Log In

Cancel
×

Search


Article Lookup

Paste a citation or DOI

Enter a citation
×