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HomeSolid State PhenomenaSolid State Phenomena Vol. 105Growth Mechanism of Biaxially Aligned Magnesium...

Growth Mechanism of Biaxially Aligned Magnesium Oxide Deposited by Unbalanced Magnetron Sputtering

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Texture and Anisotropy of Polycrystals II

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Periodical:

Solid State Phenomena (Volume 105)

Pages:

433-438

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.105.433

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Online since:

July 2005

Authors:

Pieter Ghekiere, Stijn Mahieu, Griet De Winter, Roger De Gryse, Diederik Depla, Oleg I. Lebedev

Keywords:

Biaxial Alignment, Growth Mechanism, MgO, Unbalanced Magnetron Sputtering

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