Abstract.
Electron energy loss spectroscopy (EELS) is an ideal tool to obtain chemical information from nanoscale volumes. Quantification of the experimental spectra however has prevented for a long time access to the available information in a reliable and reproducible way. We present recent advances in model-based quantification of EELS spectra and show that we obtain the best possible precision for a given dataset, as well as remarkably good accuracies when applied to three different materials. The results are shown to be far superior over conventional quantification techniques and could hold a promise for standardless quantification of EELS spectra.
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References
R F Egerton (1996) Electron energy-loss spectroscopy in the electron microscope EditionNumber2 Plenum Press New York, London
R Door D Gangler (1995) ArticleTitleMultiple least-squares fitting for quantitative electron energy-loss spectroscopy – an experimental investigation using standard specimens Ultramicroscopy 58 IssueID2 197 Occurrence Handle10.1016/0304-3991(94)00198-V Occurrence Handle1:CAS:528:DyaK2MXlsFKjsLk%3D
T Manoubi M Tence M G Walls C Colliex (1990) ArticleTitleCurve fitting methods for quantitative analysis in electron energy loss spectroscopy Microsc Microanal M 1–1 23 Occurrence Handle10.1051/mmm:019900010102300
H Shuman A P Somlyo (1987) ArticleTitleElectron energy loss analysis of near-trace-element concentrations of calcium Ultramicroscopy 21 IssueID1 23 Occurrence Handle10.1016/0304-3991(87)90004-0 Occurrence Handle1:CAS:528:DyaL2sXitFSgs7w%3D
R D Leapman C R Swyt (1988) ArticleTitleSeparation of overlapping core edges in electron energy loss spectra by multiple-least-squares fitting Ultramicroscopy 26 393 Occurrence Handle10.1016/0304-3991(88)90239-2 Occurrence Handle1:CAS:528:DyaL1MXisVWlt7s%3D
Y Y Wang R Ho Z Shao A P Somlyo (1992) ArticleTitleOptimization of quantitative electron energy loss spectroscopy in the low loss region: Phosphorus L-edge Ultramicroscopy 41 11 Occurrence Handle10.1016/0304-3991(92)90091-W Occurrence Handle1:CAS:528:DyaK38Xlt1eku7o%3D
J Verbeeck S Van Aert (2004) ArticleTitleModel based quantification of EELS spectra Ultramicroscopy 101 207 Occurrence Handle10.1016/j.ultramic.2004.06.004 Occurrence Handle1:CAS:528:DC%2BD2cXnvFGlurg%3D
J Verbeeck S Van Aert G Bertoni (2006) ArticleTitleModel-based quantification of EELS spectra: including the fine structure Ultramicroscopy 106 976 Occurrence Handle10.1016/j.ultramic.2006.05.006 Occurrence Handle1:CAS:528:DC%2BD28XhtVGitbzO
J Verbeeck G Bertoni (2008) ArticleTitleModel-based quantification of EELS spectra: treating the effect of correlated noise Ultramicroscopy 108 IssueID2 74–83 Occurrence Handle10.1016/j.ultramic.2007.03.004 Occurrence Handle1:CAS:528:DC%2BD2sXhsVejsbfE
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Correspondence: Jo Verbeeck, Electron Microscopy for Materials Science (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium; Institut für Festkörperphysik, Technische Universität Wien, Wiedner Hauptstrasse 8–10, 1040 Wien, Austria
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Verbeeck, J., Bertoni, G. Model-based quantification of EELS: is standardless quantification possible?. Microchim Acta 161, 439–443 (2008). https://doi.org/10.1007/s00604-008-0948-7
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DOI: https://doi.org/10.1007/s00604-008-0948-7