Abstract
A set of models is developed for a microsecond pulsed glow discharge, to describe the behavior of argon excited levels, including the metastables, as well as the cathodic sputtering and the behavior of sputtered
* Corresponding authors
a
University of Antwerp, Department of Chemistry, Universiteitsplein 1, Wilrijk-Antwerp, Belgium
E-mail:
bogaerts@uia.ua.ac.be
A set of models is developed for a microsecond pulsed glow discharge, to describe the behavior of argon excited levels, including the metastables, as well as the cathodic sputtering and the behavior of sputtered
Modeling of a microsecond pulsed glow discharge: behavior of the argon excited levels and of the sputtered
A. Bogaerts and R. Gijbels, J. Anal. At. Spectrom., 2001, 16, 239 DOI: 10.1039/B009289O
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