Plasma chemistry modeling for an inductively coupled plasma used for the growth of carbon nanotubes

A hybrid model, called the hybrid plasma equipment model (HPEM), is used to describe the plasma chemistry in an inductively coupled plasma, operating in a gas mixture of C₂H₂ with either H₂ or NH₃, as typically used for carbon nanotube (CNT) growth. Two-dimensional profiles of power density, electron temperature and density, gas temperature, and densities of some plasma species are plotted and analyzed. Besides, the fluxes of the various plasma species towards the substrate (where the CNTs can be grown), as well as the decomposition rates of the feedstock gases (C₂H₂, NH₃ and H₂), are calculated as a function of the C₂H₂ fraction in both gas mixtures.