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Study of silicon nitride O-ring resonator for gas-sensing applications

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, , Citation A Elmanova et al 2020 J. Phys.: Conf. Ser. 1695 012124 DOI 10.1088/1742-6596/1695/1/012124

1742-6596/1695/1/012124

Abstract

In this work, we experimentally studied the influence of different gaseous surroundings on silicon nitride O-ring resonator transmission. We compared the obtained results with numerical calculations and theoretical analysis and found a good agreement between them. Our results have a great potential for gas sensing applications, where a compact footprint and high efficiency are desired simultaneously.

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10.1088/1742-6596/1695/1/012124